Literature Repository for
GaAs Fabrication Block Course

Prof. Dominik Zumbühl, dominik.zumbuhl@clutterunibas.ch
(last updated February 13, 2017, m)

GaAs Nano Fabrication

device details
... Hall bar design pdf
...... mesa png / jpg (note: jpg's do not like transparency, so, if possible, use the png files)
...... ohmics png / jpg
...... gates png / jpg
... typical 2DEG growth profile pdf
... parameters for annealing and wirebonding pdf


1 introduction
... Slides pdf

2 cleave and clean GaAs
... Williams, pages 17-46, Introduction pdf
... Williams, pages 81-94, Cleaning pdf

3 photo lithography
... Waser, pages 223-241, lithography pdf

4 GaAs etching
... Williams, pages 95-106, etching pdf

6 thin film deposition
... Waser, pages 199-204, evaporation pdf
... Heinzel, pages 101-110, fabrication pdf

7 Ohmics
... Look, pages 21-35, ohmics and annealing pdf

10 wire bonding
... Heinzel, pages 110-111, bonding pdf

12 cryogenics, low T, low noise measurements
... Heinzel, pages 110-120, cryogenics pdf
... Heinzel, pages 121-123, 127 & 128, measuring pdf
... online tutorial 4 wire measurement technique link

13 density and mobility of a 2DEG
... lecture notes pdf